Journal of Micromechanics and Microengineering - latest papers
The electrode is an important part of a micro-ultrasonic phased array, commonly fabricated by magnetron sputtering technology. However, with the expansion of the application field, the structures of the phased arrays are becoming more complex, making the traditional magnetron sputtering method no longer applicable, and the realization of micro-scale...
This study used a microfluidic device with a focus-wrapping structure to create double-layer calcium alginate hydrogel drug particles in a one-step process. We validated the double-layer structure of the particles using both a fluorescence and regular light microscope. Curcumin and catalase were distributed independently in each layer, and we expected...
A novel monolithic compliant Lorentz-force-driven XY nanopositioning system (MCLNS) is designed, analyzed, and experimentally assessed with the aim of high-resolution positioning across a large workspace. A double-symmetric Lorentz-force actuator (DSLA) with the benefits of zero friction, high thrust, and large stroke is proposed to generate the actuation...
This corrigendum corrects typographic errors in the article. The corrections do not change the conclusions of the article.
The connection of silicon carbide (SiC) to glass is important for the development of microelectromechanical systems. In the study, glass-SiC-glass with SiC as common anode was effectively bonded by using anodic bonding technology in atmosphere. The interfacial microstructure of bonded joints was analyzed by using scanning electron microscope, energy-dispersive...
Superhydrophobic surfaces have attracted increasing interests due to their excellent features, while achieving facile preparation of superhydrophobic surface with good mechanical stability is still a challenging work. In this paper, we prepared a superhydrophobic surface by sanding polytetrafluoroethylene powder directly onto the surface of a polyethylene...
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