Latest articles for Journal of Micromechanics and Microengineering
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Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method

The electrode is an important part of a micro-ultrasonic phased array, commonly fabricated by magnetron sputtering technology. However, with the expansion of the application field, the structures of the phased arrays are becoming more complex, making the traditional magnetron sputtering method no longer applicable, and the realization of micro-scale...

Wed Apr 3, 2024 21:04
Double-layer coated particles formed by one-step method based on microfluidic technology

This study used a microfluidic device with a focus-wrapping structure to create double-layer calcium alginate hydrogel drug particles in a one-step process. We validated the double-layer structure of the particles using both a fluorescence and regular light microscope. Curcumin and catalase were distributed independently in each layer, and we expected...

Wed Apr 3, 2024 21:04
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system

A novel monolithic compliant Lorentz-force-driven XY nanopositioning system (MCLNS) is designed, analyzed, and experimentally assessed with the aim of high-resolution positioning across a large workspace. A double-symmetric Lorentz-force actuator (DSLA) with the benefits of zero friction, high thrust, and large stroke is proposed to generate the actuation...

Wed Apr 3, 2024 21:04
Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J. Micromech. Microeng. 34 015009)

This corrigendum corrects typographic errors in the article. The corrections do not change the conclusions of the article.

Fri Mar 29, 2024 14:00
Study on the mechanism of glass-SiC-glass anodic bonding process

The connection of silicon carbide (SiC) to glass is important for the development of microelectromechanical systems. In the study, glass-SiC-glass with SiC as common anode was effectively bonded by using anodic bonding technology in atmosphere. The interfacial microstructure of bonded joints was analyzed by using scanning electron microscope, energy-dispersive...

Thu Mar 28, 2024 13:17
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder

Superhydrophobic surfaces have attracted increasing interests due to their excellent features, while achieving facile preparation of superhydrophobic surface with good mechanical stability is still a challenging work. In this paper, we prepared a superhydrophobic surface by sanding polytetrafluoroethylene powder directly onto the surface of a polyethylene...

Wed Mar 27, 2024 12:31

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