Through silicon via (TSV) technology plays a pivotal role in three-dimensional integrated circuits. However, excessive surface thickness and uneven wafer plating during TSV copper electroplating pose significant challenges to TSV reliability. This paper proposes a novel rotating cathode electroplating technique that utilizes flow field induction by...

In recent years, considerable research advancements have emerged in the application of inverse design methods to enhance the performance of electromagnetic (EM) metamaterials. Notably, the integration of deep learning (DL) technologies, with their robust capabilities in data analysis, categorization, and interpretation, has demonstrated revolutionary...

Electrochemical discharge machining is an advanced micro-machining process for machining of conductive as well as non-conductive hard and brittle materials, e.g. glass, ceramics, silicon wafer, etc. The present work explores the machining of glass using an in-house developed novel ultrasonic assisted rotary electrochemical discharge machining setup....

This paper proposes an efficient nonlinear one-dimensional (1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant micro-electro-mechanical system (MEMS) mirrors with cascaded structures. The time-dependent damping moment due to viscous shear and pressure drag is computed using semi-empirical analytical equations...

The electrode is an important part of a micro-ultrasonic phased array, commonly fabricated by magnetron sputtering technology. However, with the expansion of the application field, the structures of the phased arrays are becoming more complex, making the traditional magnetron sputtering method no longer applicable, and the realization of micro-scale...

This study used a microfluidic device with a focus-wrapping structure to create double-layer calcium alginate hydrogel drug particles in a one-step process. We validated the double-layer structure of the particles using both a fluorescence and regular light microscope. Curcumin and catalase were distributed independently in each layer, and we expected...